Staff Process Engineer, Thin Film Deposition, Terafab

The team is seeking a Staff Process Engineer to own and optimize thin-film deposition processes for semiconductor and functional materials applications. You will be responsible for developing, characterizing, and scaling deposition processes across PVD, CVD, PECVD, and ALD platforms, translating materials requirements into robust, manufacturable process recipes. Working closely with materials scientists and device engineers, you will combine hands-on equipment expertise with a strong understanding of film growth mechanisms and process-structure-property relationships.This position requires up to 20% domestic travel.

• Develop and optimize thin-film deposition processes (PVD, CVD, PECVD, ALD, sputtering) for semiconductor and functional materials
• Design and execute DOE (Design of Experiments) to establish process windows and identify critical process parameters
• Characterize deposited films using standard metrology (ellipsometry, profilometry, XRD, SEM, AFM) and correlate process conditions to film properties
• Troubleshoot deposition equipment issues, maintain process tools, and coordinate with equipment vendors on upgrades and maintenance
• Collaborate with other process, module, integration, reliability engineers to develop a working device
• Collaborate with materials engineers to qualify new target materials, precursors, and process chemistries
• Develop process documentation, standard operating procedures, and statistical process control (SPC) frameworks
• Support technology transfer from R&D to pilot production, ensuring process reproducibility and yield targets are met
• Contribute to the development of in-line metrology and process monitoring strategies

• Degree in Materials Science, Chemical Engineering, Physics, or a related discipline, or equivalent experience
• 5+ years of hands-on experience with thin-film deposition tools and processes in a cleanroom or fab environment with strong understanding of film growth mechanisms, nucleation, and microstructure evolution
• Experience with DOE methodology, statistical analysis tools (JMP, Minitab, or equivalent), and proficiency in standard thin-film metrology techniques
• Experience in collaborative optimization with other module, integration and/or reliability engineers
• Strong problem-solving skills and systematic approach to process debugging
• Experience with reactive sputtering, plasma-enhanced CVD, or plasma-enhanced ALD is preferred
• Familiarity with vacuum system design, plasma diagnostics, or in-situ monitoring is a plus
• Experience scaling processes from R&D to manufacturing volumes is a plus
• Ability to travel up to 20%

Along with competitive pay, as a full-time Tesla employee, you are eligible for the following benefits at day 1 of hire:

• Medical plans > plan options with $0 payroll deduction
• Family-building, fertility, adoption and surrogacy benefits
• Dental (including orthodontic coverage) and vision plans, both have options with a $0 paycheck contribution
• Company Paid (Health Savings Accounts) HSA Contribution when enrolled in the High-Deductible medical plan with HSA
• Healthcare and Dependent Care Flexible Spending Accounts (FSA)
• 401(k) with employer match, Employee Stock Purchase Plans, and other financial benefits
• Company paid Basic Life, AD&D
• Short-term and long-term disability insurance (90 day waiting period)
• Employee Assistance Program
• Sick and Vacation time (Flex time for salary positions, Accrued hours for Hourly positions), and Paid Holidays
• Back-up childcare and parenting support resources
• Voluntary benefits to include: critical illness, hospital indemnity, accident insurance, theft & legal services, and pet insurance
• Weight Loss and Tobacco Cessation Programs
• Tesla Babies program
• Commuter benefits
• Employee discounts and perks program